Mcc_edge Bead Remover
MCC
BENEFITS
NANOTM EBR PG
• Permits use of single universal
(Edge Bead Remover)
edge bead remover
EBR PG is specifically formulated to quickly and cleanly remove edge beads that build-up
• Low dispense volumes and
during the spin coat process. Edge bead removal is performed immediately after spin coat by
reduced disposal costs
directing a stream of EBR PG near the edge of the wafer while it is spinning. The edge bead
remover nozzle can be positioned near the wafer’s edge to dispense EBR PG from the top or
• Excellent for spin bowl and
from the backside/bottom. By controlling spin speed, nozzle position, and nozzle direction, the
equipment clean up
resist edge bead is removed. It is important during edge bead removal that the backside of the
wafer/substrate not be contaminated with resist from the front. By choosing a spin speed
appropriate for the size of the wafer, the resulting centrifugal force prevents this problem.
COMPATIBLE WITH
• PMGI & LOR
Edge Bead
Equipment
Spin Coat
Soft Bake
Remove
Cleandown
Resist
Resist
• PMMA & copolymer
with EBR PG
with EBR PG
• SU-8
Strip/Remove
Rinse in DI
Expose and
Deposition
• g-line, i-line and DUV resists
Resist Layer in
Water to
Develop Resist
or Etch
Remover PG
Resistivity Level
The edge bead removal process is equipment and substrate specific. Therefore, the following
baseline process suggestions may be modified and optimized after considering the following:
• Wafer size
• Topside or backside EBR dispense
• Nozzle position and angle with respect to wafer edge
• Thickness of edge bead being removed
PROCESS GUIDELINES
a. After resist spin coat, reduce spin speed to 800rpm*.
b. Dispense EBR PG, at ~3psi, for 3 seconds while maintaining 800rpm*.
c. Ramp to 1000rpm** at 5000rpm/sec for 3-5 additional seconds of EBR dispense.
d. Turn EBR dispense off.
e. Accelerate to 2500rpm at 1000rpm/sec. Continue to spin for 10 seconds.
g. Reduce spin speed to 0 at 1000rpm/sec.
*Increase spin speed for smaller wafers, e.g. 1000rpm for 4" wafers.
**1500rpm for 4" wafers.
HANDLING (ENVIRONMENTAL, HEALTH AND SAFETY)
CAUTION! EBR PG is a FLAMMABLE liquid. Use precautions in handling EBR PG. Avoid contact with
eyes, skin, and clothing. Use with adequate ventilation. Avoid breathing fumes. Wear chemical-
resistant eye protection, chemical gloves (butyl, neoprene) and protective clothing when handling
EBR PG. Contact with eyes, skin, and mucous membranes causes irritation. In case of eye contact,
flush with water for 15 minutes lifting eyelids frequently. Call a physician immediately. Review the
current MSDS (Material Safety Data Sheet) before using.
MATERIAL AND EQUIPMENT COMPATIBILITY
EBR PG is compatible with glass, ceramic, PTFE(TEFLON), stainless steel, and equivalent
materials.The primary ingredient, a cyclic ether, will attack various elastomers such as VITON A,
BUNA N, EPDM, and NEOPRENE over time. It will also attack PVC, CPVC and polyester. PTFE is
recommended for both O-rings and tubing.
STORAGE
Store REMOVER PG upright in original containers in a dry area between 4 and 27ºC(40-80ºF).
EBR PG is an organic FLAMMABLE liquid. Keep away from sources of ignition, light, heat,
oxidants, acids, and reducers. Shelf life is 13 months from date of manufacture.
DISPOSAL
Each locality, state, and county has unique regulations regarding the disposal of organic solvent
solutions of dissolved polymer such as used EBR PG. It is the responsibility of the customer to
ensure proper disposal in compliance with all applicable Federal/Local codes and regulations.
See MSDS for additional information.
1254 CHESTNUT STREET
NEWTON, MA 02464
PHONE: 617.965.5511
FAX: 617.965.5818
EMAIL: mcc@microchem.com
The information is based on our experience and is, we believe to be reliable, but may not be complete. We make no guarantee or warranty, expressed
or implied, regarding the information, use, handling, storage, or possession of these products, or the application of any process described herein or
the results desired, since the conditions of use and handling of these products are beyond our control. Nothing herein shall be construed as a
recommendation to use any product in violation of any patent rights.
W W W . M I C R O C H E M . C O M
©2001 MicroChem Corp. All rights reserved.
Rev 01
